16 citations · 16 across the 1 of their papers we have counts for
2 papers
physics.app-ph2018
Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
Roberto Fallica, Benjamin Watts, Benedikt Rösner +4
We report on the near edge X-ray absorption fine structure (NEXAFS) spectroscopy of hybrid organic-inorganic resists. These materials are nonchemically amplified systems based on S…
physics.chem-ph2017★ 16 cited
A comparative study of resists and lithographic tools using the Lumped Parameter Model
Roberto Fallica, Robert Kirchner, Dominique Mailly +1
A comparison of the performance of high resolution lithographic tools is presented here. We use extreme ultraviolet interference lithography, electron beam lithography, and He ion…