110 citations · 205 across the 13 of their papers we have counts for
13 papers
XPS studies on AlN thin films grown by ion beam sputtering in reactive assistance of N+/N2+ ions: Substrate temperature induced compositional variations
Neha Sharma, S. Ilango, S. Dash +1
We report on an XPS study of AlN thin films grown on Si(100) substrates by ion beam sputter deposition (IBSD) in reactive assistance of N+/N2+ ions to unravel the compositional var…
Novel single phase vanadium dioxide nanostructured films for methane sensing near room temperature
A. K. Prasad, S. Amirthapandian, S. Dhara +3
Methane (CH_4) gas sensing properties of novel vanadium dioxide (VO_2) nanostructured films is reported for the first time. The single phase nanostructures are synthesized by pulse…
Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique
Padmalochan Panda, R. Ramaseshan, N Ravi +5
We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function o…
Optical band gap and associated band-tails in nanocrystalline AlN thin films grown by reactive IBSD at different substrate temperatures
Neha Sharma, Shilpam Sharma, K. Prabakar +4
AlN thin films have been grown on Si (100) substrates by reactive ion beam sputter deposition (IBSD) at different substrate temperatures varying from room temperature (RT) to 500oC…
Mass spectral analysis and quantification of Secondary Ion Mass Spectrometry data
A. K. Balamurugan, S. Dash, A. K. Tyagi
This work highlights the possibility of improving the quantification aspect of Cs-complex ions in SIMS (Secondary Ion Mass Spectrometry), by combining the intensities of all possib…
Preferentially orientated E-beam TiN thin films using focused jet of nitrogen gas
R. Ramaseshan, Feby Jose, S. Rajagopalan +1
A modified electron beam evaporator has been used judiciously to synthesize TiN thin films with (111) preferred orientation. This new design involved in creating local plasma by ac…