41 citations · 64 across the 3 of their papers we have counts for
3 papers
cond-mat.stat-mech2007★ 22 cited
Scaling properties of pyrex and silicon surfaces blasted with sharp particles
Z. Moktadir, H. Wensink, M. Kraft
The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for micro-systems, it allows the producti…
physics.atom-ph2005★ 41 cited
Integrated optical components on atom chips
S. Eriksson, M. Trupke, H. F. Powell +8
We report on the integration of small-scale optical components into silicon wafers for use in atom chips. We present an on-chip fibre-optic atom detection scheme that can probe clo…
physics.optics2004★ 1 cited
Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon
Z. Moktadir, C. Gollasch, E. Koukharenko +6
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching i…