collaborators

1 paper

physics.comp-ph2025

Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography

Yuhao Zhou, Huangyan Shen, Qingliang Song +3

The directed self-assembly (DSA) of block copolymers (BCPs) offers a highly promising approach for the fabrication of contact holes or vertical interconnect access at sub-7nm techn…