2 papers
cond-mat.mtrl-sci2025
New Directions in Focused Ion Beam Induced Deposition for the Nanoprinting of Functional 3D Heterostructures
Frances Isabel Allen
The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subt…
physics.app-ph2024
Focused helium ion beam nanofabrication by near-surface swelling
Sherry Mo, Dana O. Byrne, Frances I. Allen
The focused helium ion beam microscope is a versatile imaging and nanofabrication instrument enabling direct-write lithography with sub-10-nm resolution. Subsurface damage and swel…