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1 paper

physics.optics2025

Multi-NA Metalens Array for Compact High-NA Microscopy

Alireza Khalilian, Jie Fan, Mehdi Sh. Yeganeh +2

We demonstrate a CMOS-compatible silicon-rich nitride metalens array for visible microscopy at 660 nm. Three co-planar elements provide numerical apertures of 0.54, 0.92, and 0.97,…