most citedDirect fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

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cond-mat.mtrl-sci2016★ 41 cited

Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

P. Olivero, G. Amato, F. Bellotti +10

We report on a novel method for the fabrication of three-dimensional buried graphitic micropaths in single crystal diamond with the employment of focused MeV ions. The use of impla…