2 papers
physics.app-ph2025
Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication
E. M. Anderson, C. R. Allemang, A. J. Leenheer +13
Atomic precision advanced manufacturing (APAM) dopes silicon with enough carriers to change its electronic structure and can be used to create novel devices by defining metallic re…
cond-mat.mtrl-sci2025
A reduced-temperature process for preparing atomically clean Si(100) and SiGe(100) surfaces with vapor HF
Luis Fabián Peña, Evan M. Anderson, John P. Mudrick +4
Silicon processing techniques such as atomic precision advanced manufacturing (APAM) and epitaxial growth require surface preparations that activate oxide desorption (typically >10…