Wafer-Scale All-Dielectric quasi-BIC Metasurfaces: Bridging High-throughput Deep-UV Lithography with Nanophotonic Applications

Aidana Beisenova, Wihan Adi, Wenxin Wu +5

High quality-factor (Q) dielectric metasurfaces operating in the visible to near-infrared range usually require sub-200 nm features, limiting their fabrication to expensive, low-th…