Nano Imprint Lithography on Silica Sol-gels: a simple route to sequential patterning

Christophe Peroz, Vanessa Chauveau, Etienne Barthel +1

Since the pioneering work of S.Y. Chou et al.[1] Nano Imprint Lithography (NIL) has emerged as a promising technique for surface patterning, opening for numerous applications rangi…