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physics.plasm-ph2004
Control of fluctuations in ECR plasma by applying multipole magnetic fields
Hayato Tsuchiya, Mayuko Koga, Masayuki Fukao +1
The control of fluctuations generated in an electron cyclotron resonance (ECR) plasma is attempted by changing microwave powers. It is found that when a cage is introduced in the v…
physics.plasm-ph2004
Production of a large diameter ECR plasma for plasma processing
Mayuko Koga, Yasuhiro Hishikawa, Hayato Tsuchiya +1
A large diameter plasma over 300 mm in diameter is produced by electron cyclotron resonance (ECR) discharges using a newly developed large diameter chamber of 400 mm in inner diame…