most citedRaman studies on nanocomposite silicon carbonitride thin film deposited by RF magnetron sputtering at different substrate temperatures

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cond-mat.mtrl-sci2016★ 27 cited

Raman studies on nanocomposite silicon carbonitride thin film deposited by RF magnetron sputtering at different substrate temperatures

A. S. Bhattacharyya, S. K. Mishra

Raman studies of nanocomposite SiCN thin film by sputtering showed that with an increase of substrate temperature from room temperature to 500oC, a transition from mostly sp2 graph…