2 papers
physics.ins-det2025
Accurate Reporting of Ion Time-of-Flight during HiPIMS with Gated Front-End Mass Spectrometry
Nathan Rodkey, Jyotish Patidar, Kerstin Thorwarth +1
The quality of high-power impulse magnetron sputtering (HiPIMS) deposited films can often improve through the effective use of metal-ion acceleration, requiring precise measurement…
cond-mat.mtrl-sci2025
Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system
Stefanie Frick, Oleksandr Pshyk, Arnold Müller +3
Oxynitrides are used in a variety of applications including photocatalysts, high-k dielectrics or wear-resistant coatings and often show intriguing multi-functionality. To accelera…