collaborators

1 paper

cond-mat.mtrl-sci2016

Study of ZrO2 Thin Films Deposited at Glancing Angle by Magnetron Sputtering under Varying Substrate Rotation

R. B. Tokas, S. Jena, J. S. Mishal +7

In the present work, a set of ZrO2 thin films have been deposited at 82 degree angle of deposition at several substrate rotation speeds and at 0 degree. The effect of substrate rot…