Investigating Instabilities in Magnetized Low-pressure Capacitively-Coupled RF Plasma using Particle-in-Cell (PIC) Simulations

Sathya Ganta, Kallol Bera, Shahid Rauf +5

The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell (PIC)…