Ion-Implanted Erbium in X-cut Thin-film Lithium Niobate: Luminescence and Low-Temperature Response

Daniel Blight, Mason Adshead, Alessandro Prencipe +3

This study presents a method for deterministic Er3+ doping of x-cut TFLN using focused ion beam (FIB) implantation with sub-100 nm spatial precision, enabling seamless integration…