Showing physics.plasm-phShow all
2 papers · 1 filter
physics.plasm-ph2018
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
Zoltan Donko, Aranka Derzsi, Mate Vass +3
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions…
physics.plasm-ph2016
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…