16 citations · 16 across the 2 of their papers we have counts for
Showing physics.plasm-phShow all
2 papers · 1 filter
physics.plasm-ph2016★ 16 cited
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
physics.plasm-ph2016
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…