50 citations · 51 across the 5 of their papers we have counts for
1 paper · 2 filters
M. Stoffel, A. Malachias, T. Merdzhanova +6
We investigate the effect of strain on the etching rate of two SiGe wet etchants, namely NH4OH:H2O2 and H2O2. For both etchants, we found that there is no appreciable strain select…