An argon ion beam milling process for native ${\text{AlO}}_{\text{x}}$ layers enabling coherent superconducting contacts

Lukas Grünhaupt, Uwe von Lüpke, Daria Gusenkova +8

We present an argon ion beam milling process to remove the native oxide layer forming on aluminum thin films due to their exposure to atmosphere in between lithographic steps. Our…