Optimisation of NbN thin films on GaAs substrates for in-situ single photon detection in structured photonic devices

Günther Reithmaier, Jörg Senf, Stefan Lichtmannecker +5

We prepare NbN thin films by DC magnetron sputtering on [100] GaAs substrates, optimise their quality and demonstrate their use for efficient single photon detection in the near-in…