2 papers
physics.optics2025
Bayesian inference for precise and uncertainty-quantified single-shot widefield interferometric geometrical nanometrology
Damian Suski, Maria Cywinska, Julianna Winnik +5
Advanced geometrical nanometrology is critical for process control in semiconductor manufacturing, supporting applications in, e.g., photonic integrated circuits, nanoelectronics,…
physics.optics2025
OSI-flex: Optimization-Based Shearing Interferometry for Joint Phase and Shear Estimation Using a Flexible Open-Source Framework
Julianna Winnik, Damian Suski, Matyáš Heto +4
Shearing interferometry is a common-path quantitative phase imaging technique in which an object beam interferes with a laterally shifted replica of itself, providing high temporal…