Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators

Michael R. Vissers, Jiansong Gao, David S. Wisbey +5

Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and intern…