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physics.app-ph2020
Embedded Waveguide Structures Fabricated in Porous Silicon by means of Lithography
Alexander Kellarev, Shlomo Ruschin
We report the fabrication of diverse light guiding structures embedded in oxidised porous silicon (OPS) by means of patterned pore filling through a single photoresist mask. The po…
physics.app-ph2019★ 2 cited
Low-loss Waveguide Fabrication by Inkjet Printing on Porous Silicon
Alexander Kellarev, Shlomo Ruschin
We report fabrication of optical waveguides embedded in oxidised porous silicon in a mask-less process. Patterned pore-filling was attained by means of inkjet printing, enabling la…