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cond-mat.mtrl-sci2016★ 367 cited
Integrating MEMS and ICs
Andreas C. Fischer, Fredrik Forsberg, Martin Lapisa +4
The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sens…
cond-mat.mtrl-sci2011★ 1 cited
Characterization and Predictive Modeling of Epitaxial Silicon-Germanium Thermistor Layers
B. Gunnar Malm, Mohammadreza Kolahdouz, Fredrik Forsberg +1
The thermal coefficient of resistance (TCR) for epitaxial silicon-germanium (SiGe) layers has been analyzed by experiment and simulation. Predictive simulation using drift-diffusio…