2 papers
physics.app-ph2020
Three-dimensional printing of silica-glass structures with submicrometric features
Miku Laakso, Po-Han Huang, Pierre Edinger +6
Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is tra…
cond-mat.mtrl-sci2016
Integrating MEMS and ICs
Andreas C. Fischer, Fredrik Forsberg, Martin Lapisa +4
The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sens…