Fabrication and Structural Analysis of Trilayers for Tantalum Josephson Junctions with Ta${}_2$O${}_5$ Barriers

Raahul Potluri, Rohin Tangirala, Jiangteng Liu +6

Tantalum (Ta) has emerged as a promising low-loss material, enabling record coherence times in superconducting qubits. This enhanced performance is largely attributed to its stable…