17 citations · 29 across the 4 of their papers we have counts for
1 paper · 1 filter
Kimberley MacArthur, Bing Shi, Ray Conley +1
A tension increment after sputter deposition of 1 nm of WSi2 onto sputtered Si was observed at low Ar gas pressures. Wafer curvature data on multilayers were found to have a period…