collaborators

1 paper

physics.ins-det2016

Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM

U. Scheithauer, M. Kolb, G. A. M. Kip +2

The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X…