activity
20162026
most citedIon energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms

48 citations · 229 across the 15 of their papers we have counts for

collaborators
Showing 2022Show all

1 paper · 1 filter

physics.plasm-ph2022★ 27 cited

Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results

A. Derzsi, P. Hartmann, M. Vass +5

Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron po…