6 papers · 1 filter
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Zoltan Donko, Aranka Derzsi, Mate Vass +4
For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the M…
Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources
Mate Vass, Aranka Derzsi, Julian Schulze +1
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Com…
Electron swarm parameters in CH, CH and CH: measurements and kinetic calculations
N R Pinhão, D Loffhagen, M Vass +5
This work presents swarm parameters of electrons (the bulk drift velocity, the bulk longitudinal component of the diffusion tensor, and the effective ionization frequency) in C…
Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
Máté Vass, Sebastian Wilczek, Trevor Lafleur +3
A thorough understanding of the energy transfer mechanism from the electric field to electrons is of utmost importance for optimization and control of different plasma sources and…
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
Zoltan Donko, Aranka Derzsi, Mate Vass +3
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions…
A scanning drift tube apparatus for spatio-temporal mapping of electron swarms
I. Korolov, M. Vass, N. Kh. Bastykova +1
A "scanning" drift tube apparatus, capable of mapping of the spatio-temporal evolution of electron swarms, developing between two plane electrodes under the effect of a homogeneous…