Low-to-mid Al content ($x\sim$ 0-0.56) Al${}_x$In${}_{1-x}$N layers deposited on Si(100) by radio-frequency sputtering

R. Blasco, S. Valdueza-Felip, D. Montero +3

Radio-frequency (RF) sputtering is a low-cost technique for the deposition of large-area single-phase AlInN on silicon layers with application in photovoltaic devices. Here, the ef…