3 papers
physics.app-ph2025
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
physics.app-ph2025
Thermal Resilience of Suspended Thin-Film Lithium Niobate Acoustic Resonators up to 550 °C
Mihir Chaudhari, Naveed Ahmed, Vivek Tallavajhula +4
This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 °C, among the highest temperature at wh…
physics.app-ph2024
Low-Loss Higher-Order Cross-Sectional Lamé Mode SAW Devices in 10-20 GHz Range
Ian Anderson, Tzu-Hsuan Hsu, Vakhtang Chulukhadze +6
This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 5…