Micro-Electro-Mechanical System Vapor Cells With Passivated Internal Cavities

Rajesh Pandiyan, Sanyasi Bobbara, Somayeh Mirzaee +5

Micro-Electro-Mechanical, so called 'MEMs,' vapor cells are a key component in atom-based quantum sensors, such as clocks, gyroscopes, electric field sensors and magnetometers. MEM…