Nanoscale mapping of the full strain tensor, rotation and composition in partially relaxed In${}_x$Ga${}_{1-x}$N layers by scanning X-ray diffraction microscopy

Carsten Richter, Vladimir M. Kaganer, Armelle Even +5

Strain and composition play a fundamental role in semiconductor physics, since they are means to tune the electronic and optical properties of a material and hence develop new devi…