Sidewall depletion in nano-patterned LAO/STO heterostructures

M. Z. Minhas, H. H. Blaschek, F. Heyroth +1

We report the fabrication of nanostructures from the quasi-two-dimensional electron gas (q2DEG) formed at the LaAlO${}_3$/ SrTiO${}_3$ (LAO/STO) interface. The process uses electro…