most citedAtomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle x-ray scattering

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physics.optics2015★ 32 cited

Atomic layer deposited second order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

StÉphane Clemmen, Artur Hermans, Eduardo Solano +6

We report the fabrication of artificial unidimensional crystals exhibiting an effective bulk second-order nonlinearity. The crystals are created by cycling atomic layer deposition…