133 citations · 181 across the 3 of their papers we have counts for
3 papers
Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
D. I. Astakhov, W. J. Goedheer, C. J. Lee +8
We used numerical modeling to study the evolution of EUV-induced plasmas in argon and hydrogen. The results of simulations were compared to the electron densities measured by micro…
Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon
R. M. van der Horst, J. Beckers, E. A. Osorio +1
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impac…
Time-resolved OES of nanosecond pulsed discharges in N and N/HO mixtures]{Time-resolved optical emission spectroscopy of nanosecond pulsed discharges in atmospheric pressure N and N/HO mixtures
R. M. van der Horst, T. Verreycken, E. M. van Veldhuizen +1
In this contribution, nanosecond pulsed discharges in N and N/0.9% HO at atmospheric pressure (at 300 K) are studied with time-resolved imaging, optical emission…