Fabrication and characterization of Nb/Al-AlN /Nb superconducting tunnel junctions

Alexey Pavolotsky, François Joint, Udupa Sujit Manjunatha +6

We report a Nb/Al-AlN /Nb superconducting tunnel junction process in which the AlN barrier is formed by plasma nitridation using a compact microwave electron-cyclotron-resonance (E…