15 citations · 17 across the 2 of their papers we have counts for
1 paper · 1 filter
Najmeh Sadegh, Maarten van der Geest, Jarich Haitjema +4
Inorganic molecular materials such as tin oxo cages are a promising generation of photoresists compatible with the demands of the recently developed Extreme UltraViolet (EUV) litho…