465 citations · 2.9k across the 21 of their papers we have counts for
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quant-ph2016
Micromachined integrated quantum circuit containing a superconducting qubit
T. Brecht, Y. Chu, C. Axline +6
We present a device demonstrating a lithographically patterned transmon integrated with a micromachined cavity resonator. Our two-cavity, one-qubit device is a multilayer microwave…
quant-ph2016★ 41 cited
Suspending superconducting qubits by silicon micromachining
Y. Chu, C. Axline, C. Wang +4
We present a method for relieving aluminum 3D transmon qubits from a silicon substrate using micromachining. Our technique is a high yield, one-step deep reactive ion etch that req…
quant-ph2016★ 89 cited
A coaxial line architecture for integrating and scaling 3D cQED systems
Christopher Axline, Matthew Reagor, Reinier W. Heeres +7
Numerous loss mechanisms can limit coherence and scalability of planar and 3D-based circuit quantum electrodynamics (cQED) devices, particularly due to their packaging. The low los…