Low Resistance Non-Alloyed Ohmic Contacts to High Al Composition n-type AlGaN

Joseph E. Dill, Xianzhi Wei, Changkai Yu +6

Ohmic contacts to high (>70\%) Al content n-type Al${}_x$Ga${}_{1-x}$N ultra-wide bandgap semiconductor layers in nitride electronic and photonic devices are typically fabricated by a…