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physics.app-ph2024
High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
Sebastian Lukas, Ardeshir Esteki, Nico Rademacher +10
Suspended membranes of monoatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process…
physics.app-ph2020
Sensitive capacitive pressure sensors based on graphene membrane arrays
Makars Šiškins, Martin Lee, Dominique Wehenkel +8
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pr…