most citedSources of Variability in Alpha Emissivity Measurements at LA and ULA Levels, a Multicenter Study

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physics.ins-det2014★ 15 cited

Sources of Variability in Alpha Emissivity Measurements at LA and ULA Levels, a Multicenter Study

B. D. McNally, S. Coleman, W. K. Warburton +5

Alpha emissivity measurements are important in the semiconductor industry for assessing the suitability of materials for use in production processes. A recently published round-rob…