Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Jiangxin Song, Jintian Lin, Jialei Tang +6

We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) integrated in a microflu…