collaborators

1 paper

cond-mat.mtrl-sci2025

Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma

Ivy I. Chen, Mariya Ezzy, Emily Hsue-Chi Shi +8

Lithium niobate (LiNbO, LN) is a nonlinear optical material of high interest for integrated photonics with applications ranging from optical communications to quantum informati…