783 citations · 882 across the 16 of their papers we have counts for
Showing 2010 · physics.opticsShow all
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physics.optics2010★ 12 cited
Finite Element Simulation of the Optical Modes of Semiconductor Lasers
J. Pomplun, S. Burger, F. Schmidt +5
In the present article we investigate optical near fields in semiconductor lasers. We perform finite element simulations for two different laser types, namely a super large optical…
physics.optics2010★ 8 cited
Reduced basis method for source mask optimization
J. Pomplun, L. Zschiedrich, S. Burger +4
Image modeling and simulation are critical to extending the limits of leading edge lithography technologies used for IC making. Simultaneous source mask optimization (SMO) has beco…
physics.optics2010★ 3 cited
Reduced basis method for computational lithography
J. Pomplun, L. Zschiedrich, S. Burger +1
A bottleneck for computational lithography and optical metrology are long computational times for near field simulations. For design, optimization, and inverse scatterometry usuall…