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physics.optics2015★ 2 cited
hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures
S. Burger, P. Gutsche, M. Hammerschmidt +5
The finite-element method is a preferred numerical method when electromagnetic fields at high accuracy are to be computed in nano-optics design. Here, we demonstrate a finite-eleme…
physics.optics2015★ 10 cited
hp-finite element method for simulating light scattering from complex 3D structures
S. Burger, L. Zschiedrich, J. Pomplun +2
Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high nume…