783 citations · 859 across the 12 of their papers we have counts for
3 papers · 2 filters
Benchmark of Rigorous Methods for Electromagnetic Field Simulations
S. Burger, L. Zschiedrich, F. Schmidt +2
We have developed an interface which allows to perform rigorous electromagnetic field (EMF) simulations with the simulator JCMsuite and subsequent aerial imaging and resist simulat…
Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures
S. Burger, B. H. Kleemann, L. Zschiedrich +1
Light transmission through circular subwavelength apertures in metallic films with surrounding nanostructures is investigated numerically. Numerical results are obtained with a fre…
Accurate simulation of light transmission through subwavelength apertures in metal films
D. Lockau, L. Zschiedrich, S. Burger
We use the finite-element method for simulating light transmission through a 2D-periodic array of rectangular apertures in a film of highly conductive material. We report results w…