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fluxonium qubits 1microwave-driven coupler 1native multi-qubit gates 1superconducting processors 1Toffoli-equivalent gate 1

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most citedInvestigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

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cond-mat.mtrl-sci2025

Mutual control of critical temperature, residual resistance ratio, stress, and roughness for sputtered Nb films

E. V. Zikiy, I. A. Stepanov, S. V. Bukatin +10

Superconducting single quantum logic integrated circuits traditionally exploit magnetron sputtered niobium thin films on silicon oxide substrates. The sputtering depends on multipl…